- All sections
- H - Electricity
- H01J - Electric discharge tubes or discharge lamps
- H01J 37/304 - Controlling tubes by information coming from the objects, e.g. correction signals
Patent holdings for IPC class H01J 37/304
Total number of patents in this class: 537
10-year publication summary
|
58
|
62
|
25
|
36
|
49
|
41
|
37
|
41
|
51
|
9
|
| 2015 | 2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| NuFlare Technology, Inc. | 770 |
92 |
| Applied Materials, Inc. | 16587 |
36 |
| Axcelis Technologies, Inc. | 429 |
34 |
| Hitachi High-Tech Corporation | 4424 |
29 |
| FEI Company | 851 |
25 |
| ASML Netherlands B.V. | 6816 |
24 |
| Varian Semiconductor Equipment Associates, Inc. | 1282 |
21 |
| Carl Zeiss Microscopy GmbH | 1146 |
20 |
| Sumitomo Heavy Industries ION Technology Co., Ltd. | 96 |
19 |
| Hitachi High-Tech Science Corporation | 326 |
16 |
| Taiwan Semiconductor Manufacturing Company, Ltd. | 36809 |
14 |
| Arcam AB | 204 |
12 |
| Nikon Corporation | 7162 |
10 |
| Carl Zeiss SMT GmbH | 2646 |
10 |
| Mapper Lithography IP B.V. | 136 |
10 |
| JEOL Ltd. | 556 |
7 |
| Applied Materials Israel, Ltd. | 549 |
6 |
| Advantest Corporation | 1939 |
5 |
| Fibics Incorporated | 23 |
5 |
| KLA Corporation | 1223 |
5 |
| Other owners | 137 |